TESCOM 64-3400系列 減壓調(diào)壓閥-艾默生EMERSON
TESCOM 64-3400 Series dual-stage, ultra high purity pressure reducing regulator offers a tied diaphragm design and 10 Ra microinch / 0.25 micrometer surface finish with optional Hastelloy® trim. Inlet pressure is 3500 psig / 241 bar with outlet pressures up to 150 psig / 10.3 bar.
Applications
• Gas cabinets
• Semiconductor manufacturing
• Research labs
Features and Benefits
• 10 Ra microinch / 0.25 micrometer internal surfaces
• Full internal Electropolish is available
• Metal-to-metal body to diaphragm seal for high leak integrity
• Choice of free poppet or tied diaphragm
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